Product Description
Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas.They play an important role in scientific research and production in various fields such assemiconductors and integrated circuit industries, special materials disciplines, chemical industry,and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applicationsinclude: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching,sputtering, and ion implantation; and coating equipment, optical fiber smelting, micro reactiondevices, mixed gas distribution systems, capillary measurement, Gas chromatographs and otheranalytical instruments
Flow range | (0-5,10,20,30,50,100,200,300,500)SCCM;(0-1,2,3,5,10,20,30,50,100)SLM |
Accuracy | 1%FS of gas mass flow controller |
Linearity | 0.5%FS |
Repeatability | 0.2%FS of gas flow meter |
Responding time | Less than 1s |
Pressure difference | (0.05 to 0.3)MPa |
Max.Pressure | 3MPa |
Working temperature | 5-65 of gas mass flow controller |
Input/output | Digital:RS232/RS485 |
Power Supply | Analog: 0-5vdc or 4-20mA |
Weight | 7-16vdc,1A of gas flow meter |